Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6448182 | Stabilization of peroxygen-containing slurries used in a chemical mechanical planarization | Lindsey Hall, Ashutosh Misra | 2002-09-10 |
| 6372648 | Integrated circuit planarization method | Lindsey Hall | 2002-04-16 |