Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6437007 | Aerogel thin film formation from multi-solvent systems | Douglas M. Smith, Gregory P. Johnston, William C. Ackerman, Shin-Puu Jeng | 2002-08-20 |
| 6419742 | method of forming lattice matched layer over a surface of a silicon substrate | Wiley P. Kirk, Joe Zhou, Chih-Chen Cho | 2002-07-16 |
| 6380105 | Low volatility solvent-based method for forming thin film nanoporous aerogels on semiconductor substrates | Douglas M. Smith, Gregory P. Johnston, William C. Ackerman, Richard Stoltz, Alok Maskara +2 more | 2002-04-30 |
| 6335238 | Integrated dielectric and method | Sunil V. Hanttangady, Robert M. Wallace, Yasutoshi Okuno | 2002-01-01 |