Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6415858 | Temperature control system for a workpiece chuck | Paul Getchel, Henry A. Lyden | 2002-07-09 |
| 6375176 | Workpiece chuck with guard layer having vacuum distribution pattern | Paul Getchel, Henry A. Lyden, William Stone, Robert Lopez, Thomas Schey +1 more | 2002-04-23 |