Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6482663 | Silicon substrate having a recess for receiving an element, and a method of producing such a recess | — | 2002-11-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6482663 | Silicon substrate having a recess for receiving an element, and a method of producing such a recess | — | 2002-11-19 |