Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6395192 | Method and apparatus for removing native oxide layers from silicon wafers | Sara Stolyarova, Benjamin Brosilow | 2002-05-28 |
| 6350983 | Micro-electro-opto-mechanical inertial sensor | Shmuel Kaldor, Ehud Netzer, Dan Seter, Ofir Degani, Eran Socher | 2002-02-26 |