Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6464782 | Apparatus for vaporization sequence for multiple liquid precursors used in semiconductor thin film applications | Visweswaren Sivaramakrishnam, Hiroshi Nishizato, Jun Zhao | 2002-10-15 |