Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500059 | Apparatus and method for mounting a wafer in a polishing machine | Hsien-Shu Tsai | 2002-12-31 |
| 6482074 | Apparatus and method for transferring a torque from a rotating hub frame to a hub shaft | Hsien-Shu Tsai | 2002-11-19 |
| 6454327 | Wafer blade equipped with edge bumper | — | 2002-09-24 |