Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6394104 | Method of controlling and improving SOG etchback etcher | Ming-Chieh Yeh | 2002-05-28 |
| 6380030 | Implant method for forming Si3N4 spacer | Ching-Wen Cho, Huan-Wen Wang, Chih-Heng Shen | 2002-04-30 |