Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6491046 | Vertical batch type wafer cleaning apparatus | — | 2002-12-10 |
| 6492214 | Method of fabricating an insulating layer | Chien-Wei Chen, Shin-Yi Tsai, Jiun-Ren Lai | 2002-12-10 |
| 6350660 | Process for forming a shallow trench isolation | Shiuh-Sheng Yu, Chun-Hung Lee | 2002-02-26 |