Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500728 | Shallow trench isolation (STI) module to improve contact etch process window | — | 2002-12-31 |
| 6448167 | Process flow to reduce spacer undercut phenomena | Ying Chen | 2002-09-10 |
| 6420235 | Method of forming self-aligned mask ROM | — | 2002-07-16 |
| 6362113 | Method of forming pattern | — | 2002-03-26 |