Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6342448 | Method of fabricating barrier adhesion to low-k dielectric layers in a copper damascene process | Shau-Lin Shue, Chen-Hua Yu | 2002-01-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6342448 | Method of fabricating barrier adhesion to low-k dielectric layers in a copper damascene process | Shau-Lin Shue, Chen-Hua Yu | 2002-01-29 |