Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6340547 | Method of forming circuit patterns on semiconductor wafers using two optical steppers having nonaligned imaging systems | Ming-Fa Chen, Chih-Chien Hung, Chia-Hsiang Chen | 2002-01-22 |