Issued Patents 2002
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6489251 | Method of forming a slope lateral structure | — | 2002-12-03 |
| 6479387 | Method for reducing micro-particle adsorption effects | — | 2002-11-12 |
| 6461981 | Method of forming a conformal oxide film | — | 2002-10-08 |
| 6458657 | Method of fabricating gate | — | 2002-10-01 |
| 6448605 | Method of fabricating gate | — | 2002-09-10 |
| 6440842 | Method of forming a dual damascene structure by patterning a sacrificial layer to define the plug portions of the structure | — | 2002-08-27 |
| 6436612 | Method for forming a protection device with slope laterals | — | 2002-08-20 |
| 6423147 | Method of cleaning a wafer | — | 2002-07-23 |
| 6399259 | Method of forming alignment marks for photolithographic processing | — | 2002-06-04 |