Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6348389 | Method of forming and etching a resist protect oxide layer including end-point etch | Tzong-Sheng Chang | 2002-02-19 |
| 6346449 | Non-distort spacer profile during subsequent processing | Tzong-Sheng Chang, Shih-Chang Huang, Bor-Zen Tien | 2002-02-12 |