Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492218 | Use of a hard mask in the manufacture of a semiconductor device | — | 2002-12-10 |
| 6372591 | Fabrication method of semiconductor device using ion implantation | Seiichi Shishiguchi, Shuichi Saito | 2002-04-16 |