Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6391114 | Vacuum processing apparatus | — | 2002-05-21 |
| 6383896 | Thin film forming method and thin film forming apparatus | Naoto Kuratani, Kiyoshi Ogata | 2002-05-07 |
| 6358313 | Method of manufacturing a crystalline silicon base semiconductor thin film | Shuhei Tsuchimoto, Hirohisa Tanaka, Kiyoshi Ogata | 2002-03-19 |