Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6372304 | Method and apparatus for forming SiC thin film on high polymer base material by plasma CVD | Keiichiro Sano, Hiroaki Tamamaki, Yoshinori Hatanaka | 2002-04-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6372304 | Method and apparatus for forming SiC thin film on high polymer base material by plasma CVD | Keiichiro Sano, Hiroaki Tamamaki, Yoshinori Hatanaka | 2002-04-16 |