Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6448688 | Hard carbon film and surface-acoustic-wave substrate | Satoshi Fujii, Tomoki Uemura, Hideaki Nakahata, Shinichi Shikata | 2002-09-10 |
| 6428399 | Polishing apparatus for polishing a hard material-coated wafer | Keiichiro Tanabe, Akihoko Ikegaya, Naoji Fujimori | 2002-08-06 |
| 6416865 | Hard carbon film and surface acoustic-wave substrate | Satoshi Fujii, Tomoki Uemura, Hideaki Nakahata, Shinichi Shikata | 2002-07-09 |
| 6356006 | Diamond wafer, method of estimating a diamond wafer and diamond surface acoustic wave device | Satoshi Fujii, Kentaro Yoshida, Hideaki Nakahata, Kenjiro Higaki, Hiroyuki Kitabayashi +2 more | 2002-03-12 |