Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6447838 | Integrated circuit capacitors with barrier layer and process for making the same | Masamichi Azuma, Eiji Fujii, Yasuhiro Uemoto, Shinichiro Hayashi, Yoshihiro Shimada +5 more | 2002-09-10 |
| 6372518 | Method using unreactive gas anneal and low temperature pretreatment for fabricating layered superlattice materials and making electronic devices including same | Koji Arita | 2002-04-16 |