Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6391109 | Method of making SiC single crystal and apparatus for making SiC single crystal | Hiromu Shiomi | 2002-05-21 |
| 6336971 | Method and apparatus for producing silicon carbide single crystal | Nobuyuki Nagato, Kunio Komaki, Isamu Yamamoto, Naoki Oyanagi | 2002-01-08 |