Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6489629 | Aggregate of semiconductor micro-needles and method of manufacturing the same, and semiconductor apparatus and method of manufacturing the same | Masafumi Kubota, Masaaki Niwa, Noboru Nomura | 2002-12-03 |
| 6469535 | Method for examining semiconductor substrate, and method for controlling fabrication process of semiconductor devices | Kyoko Egashira | 2002-10-22 |
| 6395563 | Device for manufacturing semiconductor device and method of manufacturing the same | — | 2002-05-28 |
| 6372082 | Method and apparatus for semiconductor device fabrication | — | 2002-04-16 |