Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6447613 | Substrate dechucking device and substrate dechucking method | Izuru Matsuda | 2002-09-10 |
| 6340281 | Method and apparatus for positioning a disk-shaped object | Izuru Matsuda | 2002-01-22 |