Issued Patents 2002
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495307 | Chemically amplified positive resist composition | Hiroaki Fujishima, Yoshiyuki Takata | 2002-12-17 |
| 6495306 | Chemically amplified positive resist composition | Hiroaki Fujishima, Yoshiyuki Takata | 2002-12-17 |
| 6475699 | Chemically amplified positive resist composition | Seong Hyeon KIM, Yoshiyuki Takata | 2002-11-05 |
| 6406830 | Chemical amplification type positive resist compositions and sulfonium salts | Hiroki Inoue | 2002-06-18 |
| 6383713 | Chemical amplification type positive resist composition | Hiroki Inoue | 2002-05-07 |
| 6383709 | Positive resist composition comprising N-(n-octylsulfonyloxy) succinimide | Jun Tomioka, Sang Ho Lee | 2002-05-07 |
| 6383708 | Positive resist composition | Yasunori Doi, Kazuhiko Hashimoto, Haruyoshi Osaki, Ryotaro Hanawa | 2002-05-07 |
| 6348297 | Chemical amplification type positive resist | Kenji Oohashi, Hiroki Inoue | 2002-02-19 |