Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495463 | Method for chemical mechanical polishing | — | 2002-12-17 |
| 6464574 | Pad quick release device for chemical mechanical planarization | — | 2002-10-15 |
| 6450860 | Pad transfer apparatus for chemical mechanical planarization | — | 2002-09-17 |
| 6379235 | Wafer support for chemical mechanical planarization | — | 2002-04-30 |
| 6361647 | Method and apparatus for chemical mechanical polishing | — | 2002-03-26 |
| 6346036 | Multi-pad apparatus for chemical mechanical planarization | — | 2002-02-12 |