Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6380582 | Autoaligned etching process for realizing word lines in memory devices integrated semiconductor substrates | Emilio Camerlenghi, Elio Colabella, Luca Pividori | 2002-04-30 |