Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6421573 | Quasi-continuous wave lithography apparatus and method | James D. Kafka | 2002-07-16 |
| 6373565 | Method and apparatus to detect a flaw in a surface of an article | James D. Kafka | 2002-04-16 |