Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461222 | Planarizing and polishing apparatus and planarizing and polishing method | — | 2002-10-08 |
| 6440855 | Method of processing surface of workpiece and method of forming semiconductor thin layer | Yoshihiro Miyazawa | 2002-08-27 |
| 6428389 | Polishing apparatus | Hiizu Ootorii, Takaaki Kozuki | 2002-08-06 |
| 6386956 | Flattening polishing device and flattening polishing method | Takuo Ihira | 2002-05-14 |