Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6458715 | Process of manufacturing semiconductor device | Naoki Sano, Mitsunobu Sekiya, Toshiyuki Sameshima | 2002-10-01 |
| 6455227 | Multilayer resist structure, and method of manufacturing three-dimensional microstructure with use thereof | — | 2002-09-24 |
| 6438611 | Network system for ensemble performance by remote terminals | Shiburo Tokano | 2002-08-20 |
| 6433390 | Bonded substrate structures and method for fabricating bonded substrate structures | — | 2002-08-13 |
| 6429147 | Method for making an insulating film | — | 2002-08-06 |
| 6387713 | Method for manufacturing microfabrication apparatus | — | 2002-05-14 |
| 6353528 | Solid activated carbon, process for manufacturing the same and electric double layer capacitor using the same | Yuuichi Hori, Shinya Matsuno, Naotomo Hokajou | 2002-03-05 |