Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492078 | Correcting method of exposure pattern, exposure method, exposure system, photomask and semiconductor device | — | 2002-12-10 |
| 6391501 | Pattern generating method and apparatus | — | 2002-05-21 |
| 6370441 | Method and apparatus of correcting design-patterned data, method of electron beam and optical exposure, method of fabricating semiconductor and photomask devices | — | 2002-04-09 |