Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6485573 | Apparatus for reduced-pressure epitaxial growth and method of controlling the apparatus | Katsuyuki Iwata, Tadashi Ohashi, Shyuji Tobashi, Shinichi Mitani, Hideki Ito | 2002-11-26 |
| 6461428 | Method and apparatus for controlling rise and fall of temperature in semiconductor substrates | Shyuji Tobashi, Tadashi Ohashi, Katsuyuki Iwata, Hiroyuki Saito, Shinichi Mitani +6 more | 2002-10-08 |