Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6429104 | Method for forming cavities in a semiconductor substrate by implanting atoms | — | 2002-08-06 |
| 6403450 | Heat treatment method for semiconductor substrates | Christophe Maleville, Thierry Barge, Bernard Aspar, Hubert Moriceau | 2002-06-11 |