Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6387764 | Trench isolation process to deposit a trench fill oxide prior to sidewall liner oxidation growth | Vivek R. Rao, Kerem Kapkin | 2002-05-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6387764 | Trench isolation process to deposit a trench fill oxide prior to sidewall liner oxidation growth | Vivek R. Rao, Kerem Kapkin | 2002-05-14 |