Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6398640 | Light-sensitive resist which can be developed in an aqueous-alkali manner and operates negatively | Gabi Grützner, Jurgen Bendig, Ines Schmidt, Erika Sauer | 2002-06-04 |