Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479939 | Emitter material having a plurlarity of grains with interfaces in between | Zvi Yaniv, Richard Lee Fink | 2002-11-12 |
| 6432206 | Heating element for use in a hot filament chemical vapor deposition chamber | — | 2002-08-13 |