Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6416726 | Method for decomposing nitrogen fluoride or sulfur fluoride and decomposing reagent used therefor | Chiaki Izumikawa, Kazumasa Tezuka, Kazuto Ito, Hitoshi Atobe | 2002-07-09 |