Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6478836 | Cerium oxide slurry for polishing, process for preparing the slurry, and process for polishing with the slurry | Masayuki Sanbayashi, Fumio Tsujino, Kagetaka Ichikawa | 2002-11-12 |
| 6436835 | Composition for polishing a semiconductor device and process for manufacturing a semiconductor device using the same | Kagetaka Ichikawa | 2002-08-20 |
| 6410444 | Composition for polishing a semiconductor device and process for manufacturing a semiconductor device using the same | Kagetaka Ichikawa | 2002-06-25 |
| 6387139 | Cerium oxide slurry for polishing, process for preparing the slurry, and process for polishing with the slurry | Masayuki Sanbayashi, Fumio Tsujino, Kagetaka Ichikawa | 2002-05-14 |