Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6473227 | Silica glass optical material for projection lens to be utilized in vacuum ultraviolet radiation lithography, method for producing the same, and projection lens | — | 2002-10-29 |
| 6451719 | Silica glass optical material for excimer laser and excimer lamp, and method for producing the same | — | 2002-09-17 |