Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6491836 | Semiconductor wafer and production method therefor | Tadahiro Kato, Sadayuki Okuni, Shunichi Ikeda, Hisashi Oshima | 2002-12-10 |
| 6358117 | Processing method for a wafer | Tadahiro Kato, Hisashi Oshima | 2002-03-19 |