Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6432837 | Semiconductor wafer processing method and semiconductor wafers produced by the same | Takashi Nihonmatsu, Seiichi Miyazaki, Masahiko Yoshida, Tadahiro Kato | 2002-08-13 |
| 6402594 | Polishing method for wafer and holding plate | Daisuke Kobayashi, Tsuyoshi Matsuzaki | 2002-06-11 |
| 6346485 | Semiconductor wafer processing method and semiconductor wafers produced by the same | Takashi Nihonmatsu, Seiichi Miyazaki, Masahiko Yoshida, Tadahiro Kato | 2002-02-12 |