Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495000 | System and method for DC sputtering oxide films with a finned anode | James Atkinson, Hirohiko Nishiki | 2002-12-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495000 | System and method for DC sputtering oxide films with a finned anode | James Atkinson, Hirohiko Nishiki | 2002-12-17 |