Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495405 | Method of optimizing channel characteristics using laterally-crystallized ELA poly-Si films | John W. Hartzell, Yukihiko Nakata | 2002-12-17 |
| 6432804 | Sputtered silicon target for fabrication of polysilicon thin film transistors | Yukihiko Nakata, John W. Hartzell | 2002-08-13 |
| 6429097 | Method to sputter silicon films | Yukihiko Nakata | 2002-08-06 |