Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6436745 | Method of producing a semiconductor device | Masahito Gotou | 2002-08-20 |
| 6351007 | Quantum thin line producing method and semiconductor device employing the quantum thin line | Tsutomu Ashida | 2002-02-26 |
| 6346436 | Quantum thin line producing method and semiconductor device | Tohru Ueda, Kunio Kamimura | 2002-02-12 |
| 6337259 | Method for fabricating semiconductor device with high quality crystalline silicon film | Tohru Ueda, Yoshinori Higami | 2002-01-08 |