Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6413313 | Apparatus for producing polycrystalline silicon sheets and production method using the same | Koji Yoshida, Kozaburo Yano, Kazuto Igarashi, Yoshihiro Tsukuda | 2002-07-02 |