Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6472244 | Manufacturing method and integrated microstructures of semiconductor material and integrated piezoresistive pressure sensor having a diaphragm of polycrystalline semiconductor material | Paolo Ferrari, Benedetto Vigna | 2002-10-29 |
| 6417021 | Method of fabricating a piezoresistive pressure sensor | Benedetto Vigna, Paolo Ferrari | 2002-07-09 |