Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475836 | Semiconductor device and manufacturing method thereof | Hideomi Suzawa | 2002-11-05 |
| 6372523 | Etching method and etching device | Hideomi Suzawa, Tomohiko Sato, Koji Ono | 2002-04-16 |