Issued Patents 2002
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6494162 | Method for annealing a semiconductor | Hongyong Zhang | 2002-12-17 |
| 6479329 | Method for producing semiconductor device | Setsuo Nakajima, Shunpei Yamazaki, Satoshi Teramoto | 2002-11-12 |
| 6455359 | Laser-irradiation method and laser-irradiation device | Shunpei Yamazaki, Satoshi Teramoto, Takeshi Fukunaga, Setsuo Nakajima, Tadayoshi Miyamoto +1 more | 2002-09-24 |
| 6444506 | Method of manufacturing silicon thin film devices using laser annealing in a hydrogen mixture gas followed by nitride formation | Toru Takayama, Masato Yonezawa | 2002-09-03 |
| 6423586 | Method for crystallizing semiconductor material without exposing it to air | Shunpei Yamazaki, Hongyong Zhang, Yasuhiko Takemura | 2002-07-23 |
| 6388812 | Apparatus and method for laser radiation | Shunpei Yamazaki, Satoshi Teramoto, Koichiro Tanaka | 2002-05-14 |
| 6373870 | Laser irradiation apparatus and laser irradiation method | Shunpei Yamazaki, Koichiro Tanaka | 2002-04-16 |
| 6353244 | Semiconductor device and manufacturing method thereof | Shunpei Yamazaki, Hideto Ohnuma, Koichiro Tanaka | 2002-03-05 |
| 6348369 | Method for manufacturing semiconductor devices | Toru Takayama, Masato Yonezawa | 2002-02-19 |
| 6337232 | Method of fabrication of a crystalline silicon thin film semiconductor with a thin channel region | Yasuhiko Takemura, Hisashi Ohtani | 2002-01-08 |
| 6335213 | Electro-optical device and thin film transistor and method for forming the same | Hongyong Zhang | 2002-01-01 |