Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6362638 | Stacked via Kelvin resistance test structure for measuring contact anomalies in multi-level metal integrated circuit technologies | Steven Alan Lytle, Mary Roby, Daniel J. Vitkavage | 2002-03-26 |