Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6441449 | MEMS variable capacitor with stabilized electrostatic drive and method therefor | Ji-Hai Xu, Jenn Hwa Huang | 2002-08-27 |
| 6384353 | Micro-electromechanical system device | Jenn Hwa Huang, Samuel L. Coffman, Xi Sun, Ji-Hai Xu | 2002-05-07 |
| 6362018 | Method for fabricating MEMS variable capacitor with stabilized electrostatic drive | Ji-Hai Xu, Jenn Hwa Huang | 2002-03-26 |