Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6410107 | Methods for manufacturing an electrostatic actuator | Kazuhiko Sato, Hiroyuki Maruyama, Masahiro Fujii, Koji Kitahara, Keiichi Mukaiyama | 2002-06-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6410107 | Methods for manufacturing an electrostatic actuator | Kazuhiko Sato, Hiroyuki Maruyama, Masahiro Fujii, Koji Kitahara, Keiichi Mukaiyama | 2002-06-25 |