Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6455360 | Method for forming crystalline semiconductor layers, a method for fabricating thin film transistors, and a method for fabricating solar cells and active matrix liquid crystal devices | — | 2002-09-24 |
| 6444507 | Fabrication process for thin film transistors in a display or electronic device | — | 2002-09-03 |
| 6407012 | Method of producing silicon oxide film, method of manufacturing semiconductor device, semiconductor device, display and infrared irradiating device | Takao Sakamoto | 2002-06-18 |
| 6391690 | Thin film semiconductor device and method for producing the same | — | 2002-05-21 |
| 6335542 | Fabrication method for a thin film semiconductor device, the thin film semiconductor device itself, liquid crystal display, and electronic device | — | 2002-01-01 |